Apparatus and method for deposition and etch in gap fill

ABSTRACT

Provided are apparatuses and methods for performing deposition and etch processes in an integrated tool. An apparatus may include a plasma processing chamber that is a capacitively-coupled plasma reactor, and the plasma processing chamber can include a showerhead that includes a top electrode and a pedestal that includes a bottom electrode. The apparatus may be configured with an RF hardware configuration so that an RF generator may power the top electrode in a deposition mode and power the bottom electrode in an etch mode. In some implementations, the apparatus can include one or more switches so that at least an HFRF generator is electrically connected to the showerhead in a deposition mode, and the HFRF generator and an LFRF generator is electrically connected to the pedestal and the showerhead is grounded in the etch mode.

INCORPORATION BY REFERENCE

An Application Data Sheet is filed concurrently with this specificationas part of the present application. Each application that the presentapplication claims benefit of or priority to as identified in theconcurrently filed Application Data Sheet is incorporated by referenceherein in its entirety and for all purposes.

BACKGROUND

The fabrication of integrated circuits includes many diverse processingsteps. One of the operations frequently employed is the deposition of adielectric film into a gap between features patterned over or intosemiconductor wafers. One of the goals in depositing such material is toform a void-free, seam-free fill in the gap.

While deposition methods such as high density plasma (HDP),sub-atmospheric chemical vapor deposition (SACVD), and low pressurechemical vapor deposition (LPCVD) have been used for gap fill, thesemethods do not achieve the desired fill capability and conformality.Flowable chemical vapor deposition and spin-on dielectric (SOD) methodscan achieve the desired fill, but tend to deposit highly porous films.Further, these methods are especially complex and costly to integrate,as they require many extra processing steps. Atomic layer deposition(ALD) processes have also been used for gap fill for improvedconformality, but these processes suffer from long processing times andlow throughput, especially for large gaps. Furthermore, the conformalnature of ALD processes means that the aspect ratios of the gapsincrease with successive cycles. Hence, the top of a gap may fill morequickly than the bottom, preventing further diffusion of precursormaterials into the gap. Areas can expand such that voids may form in themiddle of high aspect ratio gaps.

In some cases, multi-step deposition processes are used, includingdeposition-etch-deposition processes which require distinct etchingoperations between subsequent deposition operations. The etching may bedone to remedy or prevent void formation in the gap. Specifically, theetch step can be an anisotropic etch that creates a tapered positiveslope profile so that gap fill can occur by depositing a subsequentlayer on a positive tapered slope rather than a vertical slope. This canminimize the occurrence of void formation in the gap. Voids may lead tohigh resistance, contamination, loss of filled materials, and otherwisedegrade performance of integrated circuits.

SUMMARY

This disclosure pertains to an integrated apparatus for performingdeposition and etch processes. The integrated apparatus includes aprocess chamber, where the process chamber includes a showerhead and apedestal. The integrated apparatus further includes a low-frequencyradio-frequency (LFRF) generator, a high-frequency radio-frequency(HFRF) generator, and one or more switches operatively coupled to one orboth of the LFRF generator and the HFRF generator. The one or moreswitches are configured to switch between (1) a deposition mode forperforming a deposition process, where the one or more switches in thedeposition mode couple at least the HFRF generator to the showerhead,and (2) an etch mode for performing an etch process, where the one ormore switches in the etch mode couple the HFRF generator and the LFRFgenerator to the pedestal and ground the showerhead

In some implementations, the process chamber is a capacitively-coupledplasma (CCP) reactor, and the showerhead includes a top electrode andthe pedestal includes a bottom electrode. In some implementations, theone or more switches in the deposition mode couple the HFRF generatorand the LFRF generator to the showerhead and ground the pedestal. Insome implementations, the one or more switches include a first stationrelay switch configured to electrically connect the LFRF generator andthe HFRF generator to the showerhead in the deposition mode, and asecond station relay switch configured to electrically connect the LFRFgenerator and the HFRF generator to the pedestal in the etch mode. Insome implementations, the first station relay switch is configured toswitch to a first position to electrically connect the LFRF generatorand the HFRF generator to the showerhead and switch to a second positionto ground the showerhead, and the second station relay switch isconfigured to switch to a first position to electrically connect theLFRF generator and the HFRF generator to the pedestal and switch to asecond position to ground the pedestal, where the first position of thefirst station relay switch is synchronized with the second position ofthe second station relay switch, and the first position of the secondstation relay switch is synchronized with the second position of thefirst station relay switch. In some implementations, the LFRF generatoris part of a first integrated circuit board and the HFRF generator ispart of a second integrated circuit board. In some implementations, theone or more switches include a switch operatively coupled to the HFRFgenerator and configured to switch between delivering power from theHFRF generator to the showerhead in the deposition mode and deliveringpower from the HFRF generator to the pedestal in the etch mode.

This disclosure also pertains to an integrated apparatus for performingdeposition and etch processes. The integrated apparatus includes aprocess chamber, where the process chamber includes a showerhead and apedestal. The integrated apparatus further includes an integratedcircuit board, where the integrated circuit board includes one or moreHF/LF RF generators. The integrated apparatus further includes one ormore switches operatively coupled to the one or more HF/LF RFgenerators, the one or more switches configured to switch between (1) adeposition mode for performing a deposition process, wherein the one ormore switches in the deposition mode couple at least one of the HF/LF RFgenerators to the showerhead, and (2) an etch mode for performing anetch process, wherein the one or more switches in the etch mode coupleat least one of the HF/LF RF generators to the pedestal.

In some implementations, the process chamber is a CCP reactor, andwherein the showerhead includes a top electrode and the pedestalincludes a bottom electrode. In some implementations, the integratedcircuit board includes a single HF/LF RF generator. In someimplementations, the one or more switches include a first station relayswitch configured to electrically connect one of the HF/LF RF generatorsto the showerhead in the deposition mode, and a second station relayswitch configured to electrically connect one of the HF/LF RF generatorsto the pedestal in the etch mode. In some implementations, the firststation relay switch is configured to switch to a first position toelectrically connect one of the HF/LF RF generators to the showerhead inthe deposition mode and switch to a second position to ground theshowerhead, and the second station relay switch is configured to switchto a first position to electrically connect one of the HF/LF RFgenerators to the pedestal in the etch mode and switch to a secondposition to ground the pedestal, where the first position of the firststation relay switch is synchronized with the second position of thesecond station relay switch, and the first position of the secondstation relay switch is synchronized with the second position of thefirst station relay switch. In some implementations, the one or moreswitches further include a pedestal grounding relay switch to ground thepedestal in the deposition mode when one of the HF/LF RF generators areoperatively coupled to the showerhead, and a showerhead grounding relayswitch to ground the showerhead in the etch mode when one of the HF/LFRF generators are operatively coupled to the pedestal.

This disclosure also pertains to a method of filling one or more gaps ina wafer. The method includes providing a wafer on a pedestal in a plasmaprocessing chamber, where the wafer has one or more gaps each having adepth to width aspect ratio of greater than about 5:1, depositing, inthe plasma processing chamber, a first dielectric layer in the one ormore gaps via ALD, anisotropically etching with slope control, in theplasma processing chamber, the first dielectric layer, and depositing,in the plasma processing chamber, a second dielectric layer in the oneor more gaps over the first dielectric layer via ALD.

In some implementations, a wafer temperature is between about 80° C. andabout 400° C. while depositing the first dielectric layer, whileanisotropically etching with slope control the first dielectric layer,and while depositing the second dielectric layer. In someimplementations, a pressure is between about 0.3 and about 1.0 Torrwhile depositing the first dielectric layer, while anisotropicallyetching with slope control the first dielectric layer, and whiledepositing the second dielectric layer. In some implementations, themethod further includes switching to apply a low-frequency power and ahigh-frequency power to the pedestal in the plasma processing chamberand to ground a showerhead in the plasma processing chamber prior toanisotropically etching with slope control the first dielectric layer,and switching to apply the high-frequency power to the showerhead in theplasma processing chamber and to ground the pedestal in the plasmaprocessing chamber prior to depositing the second dielectric layer.

These and other embodiments are described further below with referenceto the figures.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-1C depict example cross-sections of a wafer with a gap atvarious phases of a deposition-etch-deposition gap fill process.

FIG. 2 shows a schematic illustration of an example apparatus forcarrying out deposition processes in a conventionaldeposition-etch-deposition gap fill process.

FIG. 3 shows a schematic illustration of an example multi-stationprocessing tool.

FIG. 4A shows a schematic illustration of an example apparatus includinga capacitively-coupled plasma (CCP) reactor for carrying out depositionprocesses.

FIG. 4B shows a schematic illustration of an example apparatus includinga CCP reactor for carrying out etch processes.

FIG. 5 shows a schematic illustration of an example integrated apparatusincluding a plasma processing chamber configured to switch between adeposition mode and an etch mode according to some implementations.

FIG. 6 shows a block diagram of an example scheme for switching betweena deposition mode and an etch mode according to some implementations.

FIG. 7 shows a block diagram of an alternative example scheme forswitching between a deposition mode and an etch mode according to someimplementations.

FIG. 8 shows a schematic illustration of an example integrated apparatusincluding a plasma processing chamber configured to switch between adeposition mode and an etch mode according to some implementations.

FIG. 9A shows a schematic illustration of an example conventionalmulti-station processing tool for carrying outdeposition-etch-deposition gap fill processes.

FIG. 9B shows a schematic illustration of an example multi-stationprocessing tool including a disclosed integrated apparatus for carryingout deposition-etch-deposition gap fill processes.

FIG. 10 shows a flow diagram illustrating an example process flow forperforming a deposition-etch-deposition gap fill process on a wafer.

DETAILED DESCRIPTION Introduction

In the following description, numerous specific details are set forth inorder to provide a thorough understanding of the presented concepts. Thepresented concepts may be practiced without some or all of thesespecific details. In other instances, well known process operations havenot been described in detail so as to not unnecessarily obscure thedescribed concepts. While some concepts will be described in conjunctionwith the specific embodiments, it will be understood that theseembodiments are not intended to be limiting.

In this application, the terms “semiconductor wafer,” “wafer,”“substrate,” “wafer substrate,” and “partially fabricated integratedcircuit” are used interchangeably. One of ordinary skill in the artwould understand that the term “partially fabricated integrated circuit”can refer to a silicon wafer during any of many stages of integratedcircuit fabrication thereon. A wafer or substrate used in thesemiconductor device industry typically has a diameter of 200 mm, or 300mm, or 450 mm. The following detailed description assumes the inventionis implemented on a wafer. However, the invention is not so limited. Thework piece may be of various shapes, sizes, and materials. In additionto semiconductor wafers, other work pieces that may take advantage ofthis invention include various articles such as printed circuit boards,magnetic recording media, magnetic recording sensors, mirrors, opticalelements, micro-mechanical devices and the like.

As circuit densities increase in the semiconductor industry, the widthof gaps or trenches in a wafer decrease, thereby increasing their aspectratios and making it progressively more difficult to fill the gaps ortrenches without leaving voids. The formation of voids when the gap isnot filled completely can have adverse effects on the operation of acompleted device.

Deposition-etch-deposition sequences are employed to remedy or eliminatethe presence of voids in gap fill. Common deposition techniques that areused in deposition-etch-deposition sequences are ALD, CVD,plasma-enhanced CVD, and HDP-CVD. A deposition step may be followed byan etch step, such as a sputter etch in HDP applications or reactive ionetch (ME) in ALD applications. The etch step may be an anisotropic etchstep that creates a tapered positive slope profile. As a result, morematerial may be removed near the opening of the gap than from inside thegap.

FIGS. 1A-1C depict example cross-sections of a wafer with a gap atvarious phases of a deposition-etch-deposition gap fill process. FIG. 1Ashows a cross-section of a non-planar wafer 100 including a gap 102. Thegap width can vary according to various embodiments, which may rangefrom about 5 Å to about 50 μm. Depth to width aspect ratios can begreater than about 2:1, or greater than about 5:1, or greater than about10:1, or even greater than about 30:1. The gap 102 can be covered with athin film 104 using any suitable deposition technique, such as ALD, CVD,plasma-enhanced CVD, and HDP-CVD. In some embodiments, the thin film 104can be conformal or nearly conformal with the gap 102. As shown in FIG.1A, the thin film 104 includes a re-entrant portion 106 near the top ofthe gap 102.

In FIG. 1B, an anisotropic etch is applied to the thin film 104. There-entrant portion 106 of the thin film 104 can be selectively removedby the anisotropic etch so that an upper region 104 a of the thin film104 is thinner than a lower region 104 b. For example, an anisotropicetch may be achieved by imposing mass transfer limitations and/orlifetime limitations on the active etch species. In someimplementations, selective etching at the top of the gap 102 may alsoadjust a sidewall angle of the gap 102, so that the gap 102 is wider atthe top than at the bottom. This may further reduce bread loafingeffects in subsequent deposition phases.

In FIG. 1C, a subsequent deposition step is applied to fill or nearlyfill the gap 102. In some implementations, the gap 102 may be filledafter multiple deposition-etch-deposition sequences. The gap 102 may befree of voids. The gap 102 can be filled using any suitable depositiontechnique, such as ALD, CVD, plasma-enhanced CVD, HDP-CVD, etc.

Common gap fill processes may employ HDP-CVD systems. HDP-CVD systemsform a plasma that can be at least approximately two orders of magnitudegreater than the density of a standard CCP-CVD systems. HDP-CVD systemsare typically inductively-coupled plasma (ICP) systems. An exampleHDP-CVD system with an ICP reactor to accomplish deposition and etch isthe Speed™ system available from Lam Research Corporation of Fremont,Calif. Some HDP-CVD techniques promote sputtering by the high density ofthe plasma, which can occur simultaneous with film deposition. As aresult, deposition and etch can be said to occur simultaneously, as thesputtering component of HDP deposition processes slows deposition ofcertain features, such as corners or raised surfaces, therebycontributing to improved gap fill. However, the sputtering in suchHDP-CVD techniques may lead to undesirable redeposition of material onsidewalls of the gap. Some HDP-CVD techniques may employ separatedeposition and etch steps. During the etch step, material may benon-conformally removed by an anisotropic sputter etch. Material in thecorners may be removed over short distances along the sidewalls of thegap. However, such an anisotropic sputter etch can result inredeposition cusps that can hinder gap filling. Even though HDP-CVDtechniques may perform gap fill processes in a single chamber orapparatus, the deposited film from HDP-CVD techniques is not conformaland may actually limit the application of deposition-etch-depositionsequences to be performed in a single chamber or apparatus.

Given the limitations of HDP-CVD techniques in performing gap fill, ALDprocesses may be used to provide improved conformality. In contrast toCVD processes, ALD processes use surface-mediated deposition reactionsto deposit films on a layer-by-layer basis. In some implementations, ALDprocesses may be performed in a CCP system, such as in a CCP systemillustrated in FIG. 2. The CCP system may be capable of supplyinghigh-frequency RF power to generate a plasma. An example of such a CCPsystem is the Vector™ system available from Lam Research Corporation ofFremont, Calif.

FIG. 2 shows a schematic illustration of an example apparatus forcarrying out deposition processes in a conventionaldeposition-etch-deposition gap fill process. As shown in FIG. 2, anapparatus 200 includes a process chamber 224, which encloses othercomponents of the apparatus 200 and serves to contain the plasma. Theprocess chamber 224 includes a showerhead 214 for delivering processgases into the process chamber 224. A high-frequency radio-frequency(HFRF) generator 204 may be connected to an impedance matching network206, which is connected to the showerhead 214. In some implementations,a low-frequency radio-frequency (LFRF) generator 202 may be connected tothe impedance matching network 206 to connect to the showerhead 214. Thepower and frequency supplied by the impedance matching network 306 issufficient to generate a plasma from the process gas. In typicalprocesses, a frequency generated by the HFRF generator 204 is betweenabout 2-60 MHz, such as 13.56 MHz or 27 MHz. A frequency generated bythe LFRF generator 202 is between about 250-400 kHz, such as 350 kHz or400 kHz.

The process chamber 224 further includes a wafer support or pedestal218. The pedestal 218 can support a wafer 216. The pedestal 218 caninclude a chuck, a fork, and/or lift pins to hold the wafer 216 duringand between processing. In some implementations, the chuck may be anelectrostatic chuck.

Process gases are introduced via inlet 212. One or more source gas lines210 can be connected to a manifold 208. The process gases may bepremixed or not. Appropriate valving and mass flow control mechanismsare employed to ensure that the correct gases are delivered duringdeposition, etch, and other plasma treatment operations. Process gasesmay exit the process chamber 224 via an outlet 222. A vacuum pump 226can typically draw process gases out and maintain a suitably lowpressure within the process chamber 224.

As shown in FIG. 2, the apparatus 200 is a capacitor type system wherethe showerhead 214 is an electrode working in conjunction a groundedblock 220. In other words, the apparatus 200 is a CCP system and may becapable of supplying high-frequency RF power to the top of the processchamber 224, namely the showerhead 214. The bottom of the processchamber 224, namely the pedestal 218 and the block 220, is grounded.

One or more apparatuses for performing deposition-etch-depositionsequences, such as the apparatus 200, may be implemented in amulti-station processing tool. FIG. 3 shows a schematic illustration ofan example multi-station processing tool. The multi-station processingtool 300 may include an inbound load lock 302 and an outbound load lock304, either or both of which may comprise a plasma source. A robot 306,at atmospheric pressure, is configured to move wafers from a cassetteloaded through a pod 308 into the inbound load lock 302 via anatmospheric port 310. A wafer is placed by the robot 306 on a pedestal312 in the inbound load lock 302, the atmospheric port 310 is closed,and the load lock 302 is pumped down. Where the inbound load lock 302comprises a plasma source, the wafer may be exposed to a plasmatreatment in the load lock 312 prior to being introduced to a processchamber 314. Further, the wafer may be heated in the inbound load lock302 as well, for example, to remove moisture and adsorbed gases. Next achamber transport port 316 to the process chamber 314 is opened, andanother robot (not shown) places the wafer into the reactor on apedestal of a first station shown in the reactor for processing. Whilethe embodiment depicted in FIG. 3 includes load locks, it will beappreciated that, in some embodiments, direct entry of a wafer into aprocess station may be provided.

The depicted process chamber 314 includes four process stations,numbered 1 to 4 in the embodiment shown in FIG. 3. Each station can havea heated pedestal (shown at 318 for station 1), and gas line inlets. Itwill be appreciated that in some embodiments, each process station mayhave different or multiple purposes. For example, in some embodiments, aprocess station may be switchable between an ALD and PECVD mode. Asdiscussed later according to the present disclosure, in someembodiments, a process station may include a CCP reactor that isswitchable between a deposition mode and an etch mode. While thedepicted process chamber 314 comprises four stations, it will beunderstood that a process chamber 314 according to the presentdisclosure may have any suitable number of stations. For example, insome embodiments, a process chamber 314 may have five or more stations,while in other embodiments a process chamber 314 may have three or fewerstations.

FIG. 3 also depicts a wafer handling system 390 for transferring waferswithin the process chamber 314. In some embodiments, wafer handlingsystem 390 may transfer wafers between various process stations and/orbetween a process station and a load lock. It will be appreciated thatany suitable wafer handling systems may be employed. Non-limitingexamples include wafer carousels and wafer handling robots. FIG. 3 alsodepicts a system controller 350 employed to control process conditionsand hardware states of the multi-station processing tool 300. Systemcontroller 350 may include one or more memory devices 356, one or moremass storage devices 354, and one or more processors 352. Processor 352may include a CPU or computer, analog and/or digital input/outputconnections, stepper motor controller boards, etc.

In some embodiments, system controller 350 controls all of theactivities of the multi-station process tool 300. System controller 350executes system control software 358 stored in mass storage device 354,loaded into memory device 356, and executed on processor 352. Systemcontrol software 358 may include instructions for controlling thetiming, mixture of gases, chamber and/or station pressure, chamberand/or station temperature, purge conditions and timing, wafertemperature, RF power levels, RF frequencies, wafer and/or pedestalposition, deposition and etch mode switching, and other parameters of aparticular process performed by multi-station process tool 300. Systemcontrol software 358 may be configured in any suitable way. For example,various process tool component subroutines or control objects may bewritten to control operation of the process tool components necessary tocarry out various process tool processes in accordance with thedisclosed methods. System control software 358 may be coded in anysuitable computer readable programming language.

In some embodiments, system control software 358 may includeinput/output control (IOC) sequencing instructions for controlling thevarious parameters. For example, each phase of an ALD process mayinclude one or more instructions for execution by system controller 350.In addition, switching from a deposition mode to an etch mode mayinclude one or more instructions for execution by the system controller350. The instructions for setting process conditions for an ALD processmay be included in a corresponding ALD recipe phase, and theinstructions for setting process conditions for an anisotropic etchprocess may be included in a corresponding etch recipe phase. In someimplementations, the ALD and etch recipe phases may be sequentiallyarranged.

Other computer software and/or programs stored on mass storage device354 and/or memory device 356 associated with system controller 350 maybe employed in some embodiments. Examples of programs or sections ofprograms for this purpose include a wafer positioning program, a processgas control program, a pressure control program, a heater controlprogram, and a plasma control program.

A wafer positioning program may include program code for process toolcomponents that are used to load the wafer onto pedestal 318 and tocontrol the spacing between the wafer and other parts of process tool300.

A process gas control program may include code for controlling gascomposition and flow rates and optionally for flowing gas into one ormore process stations prior to deposition in order to stabilize thepressure in the process station. A pressure control program may includecode for controlling the pressure in the process station by regulating,for example, a throttle valve in the exhaust system of the processstation, a gas flow into the process station, etc.

A heater control program may include code for controlling the current toa heating unit that is used to heat the wafer. Alternatively, the heatercontrol program may control delivery of a heat transfer gas (such ashelium) to the wafer.

A plasma control program may include code for setting RF power levelsapplied to the process electrodes in one or more process stations.

In some embodiments, there may be a user interface associated withsystem controller 350. The user interface may include a display screen,graphical software displays of the apparatus and/or process conditions,and user input devices such as pointing devices, keyboards, touchscreens, microphones, etc.

In some embodiments, parameters adjusted by system controller 350 mayrelate to process conditions. Non-limiting examples include process gascomposition and flow rates, deposition and etch mode, wafer temperature,pressure, plasma conditions (such as RF power levels), etc. Theseparameters may be provided to the user in the form of a recipe, whichmay be entered utilizing the user interface.

Signals for monitoring the process may be provided by analog and/ordigital input connections of system controller 350 from various processtool sensors. The signals for controlling the process may be output onthe analog and digital output connections of the multi-station processtool 300. Non-limiting examples of process tool sensors that may bemonitored include mass flow controllers, pressure sensors (such asmanometers), thermocouples, etc. Appropriately programmed feedback andcontrol algorithms may be used with data from these sensors to maintainprocess conditions.

System controller 350 may provide program instructions for implementingthe disclosed processes, including the deposition-etch-deposition gapfill processes. The program instructions may control a variety ofprocess parameters, such as DC power level, RF power level, RF biaspower level, pressure, wafer temperature, etc. The instructions maycontrol the parameters to operate deposition-etch-deposition sequencesaccording to various embodiments described herein.

Deposition and Etch Modes

Typically, deposition in a CCP reactor may occur in certain hardwareconfigurations, and etch in a CCP reactor may occur in differenthardware configurations. Specifically, ALD in a CCP reactor may beoptimized according to certain RF hardware configurations, and etch in aCCP reactor may be optimized according to different RF hardwareconfigurations. FIGS. 4A and 4B show different RF hardwareconfigurations for performing deposition and etch in a CCP reactor. InFIG. 4A, the wafer is supported on a grounded electrode for depositionand the top electrode is powered. In FIG. 4B, the wafer is supported ona powered electrode for etch and the top electrode is grounded.

FIG. 4A shows a schematic illustration of an example apparatus includinga CCP reactor for carrying out deposition processes. An apparatus 400 aincludes a CCP reactor 424 capable of performing PECVD or ALD. The CCPreactor 424 includes a showerhead 414 that serves as a top electrode anda pedestal 418 that serves as a bottom electrode. The pedestal 418 isbelow and opposite the showerhead 414 and may support a wafer 416 to beprocessed. In some implementations, the wafer 416 may have one or morefeatures so that the wafer 416 is not planar. For example, the wafer 416may have one or more gaps or a plurality of gaps. In some embodiments,the pedestal 418 may be raised or lowered. Process gases are introducedto the showerhead 414 via gas inlet 412, and the showerhead 414distributes the process gases into the CCP reactor 424 and towards thewafer 416. An RF power supply 402 may be electrically connected to theshowerhead 414 for generating a plasma 430 a in a volume between theshowerhead 414 and the wafer 416. The plasma 430 a in the hardwareconfiguration of FIG. 4A can be optimized for deposition. In someembodiments, the plasma energy can be controlled by controlling one ormore of chamber pressure, gas concentration, gas mixture, RF sourcepower, RF source frequency, duty cycle, pulse frequency, etc.

FIG. 4A illustrates an example RF hardware configuration for deposition,where the RF power supply 402 can be an HFRF generator electricallyconnected to the showerhead 414 and where the pedestal 418 is grounded.The RF hardware configuration of FIG. 4A is generally not capable ofproviding sufficient etch rates because an insufficient voltage dropacross the wafer 416 would be produced. However, the RF hardwareconfiguration of FIG. 4A is capable of fast frequency tuning, which canbe important in ALD applications.

Fast frequency tuning is what allows for impedance matching to occurquickly in the RF hardware configuration of FIG. 4A. Impedance matchingis the practice of designing the input impedance of an electrical loador the output impedance of its corresponding signal source in order tomaximize the power transfer and minimize reflection from the load. In aplasma processing context, impedance matching is used to minimize thereflected power back from a plasma discharge into the transmission line(e.g., RF cables), and maximize the power transferred from an RF powersupply 402 into the plasma discharge. In addition, if the RF powersupply 402 is not matched, there is reflected power that builds standingwaves on a transmission line between the source (RF power supply 402)and the load (plasma 430 a), which can lead to further power waste andcause frequency-dependent loss. In some implementations, an impedancematching network (not shown) can be coupled to the RF power supply 402.The impedance matching network can transform the load impedancepresented from the plasma 430 a to match the source impedance of the RFpower supply 402. Typically, the impedance matching network can beequipped with one or more capacitors or inductors to tune the impedanceof the RF power supply 402 to match the plasma impedance. However,tuning the impedance using capacitors or inductors can be a longprocess, which can be undesirable in applications that require shortplasma on-times. For example, to operate in an ALD window, processes cantake on the order of 0.5 seconds or less. So rather than matchingimpedance using capacitors or inductors, impedance matching can occur bysimply switching the frequency of the RF power supply 402. Toillustrate, if the impedance of the RF power supply 402 needs to matchthe plasma impedance at 50 ohms, then the RF power supply 402 canquickly switch from operating at 13.56 MHz to 13.8 MHz. This kind offast frequency tuning may not be possible in other RF hardwareconfigurations, such as what is illustrated in FIG. 4B.

FIG. 4B shows a schematic illustration of an example apparatus includinga CCP reactor for carrying out etch processes. The apparatus 400 bincludes a CCP reactor 424 capable of performing plasma etching. Likethe apparatus 400 a in FIG. 4A, the apparatus 400 b in FIG. 4B includesa showerhead 414, a pedestal 418, a wafer 416, and a gas inlet 412. AnRF power supply 404, 406 may be electrically connected to the pedestal418 for applying a voltage drop across the wafer 416. The RF powersupply 404, 406 may include both an LFRF generator 404 and an HFRFgenerator 406. A plasma 430 b may be generated in a volume between theshowerhead 414 and the wafer 416. The plasma 430 b in the hardwareconfiguration of FIG. 4B may be optimized for etching.

FIG. 4B illustrates an example RF hardware configuration for etching,where the LFRF generator 404 and the HFRF generator 406 can beelectrically connected to the pedestal 418 and where the showerhead 414is grounded. In some implementations, the LFRF generator 404 can providea low-frequency RF signal between about 2 Hz and about 1000 kHz, such as400 kHz. In some implementations, the HFRF generator 406 can provide ahigh-frequency RF signal between about 1 MHz and about 100 MHz, such as13.56 MHz. A blocking capacitor 432 can be positioned between thepedestal 418 and both the LFRF generator 404 and the HFRF generator 406.With both high-frequency and low-frequency signals being mixed, theblocking capacitor 432 can serve as a filter leading to the pedestal418. The RF configuration of FIG. 4B is not capable of fast frequencytuning. This is due in part to the number of components in the RF paththat would prevent the fast response necessary for frequency tuning.Accordingly, ALD processes would generally not be able to operate insuch conditions where the pedestal 418 is biased in FIG. 4B. However,unlike the RF configuration of FIG. 4A, the RF configuration of FIG. 4Bis able to provide a high voltage drop across the wafer 416.

Deposition-Etch-Deposition Integrated Apparatus

Rather than performing deposition and etch in an RF hardwareconfiguration that is optimal for one process but not the other, andrather than constantly transferring a wafer from one apparatus toanother for implementing deposition-etch-deposition sequences, thepresent disclosure provides for an integrated apparatus that is optimalfor both deposition and etch, and that integratesdeposition-etch-deposition sequences in a single apparatus. Anintegrated apparatus can provide an RF hardware configuration that isoptimal for both deposition and etch modes using a combination ofdifferent hardware components, such as relay switches, DO bit switches,integrated circuit boards (e.g., splitter boards), RF generators,coaxial cables, switchboxes, RF filters, match units, etc.

FIG. 5 shows a schematic illustration of an example integrated apparatusincluding a plasma processing chamber configured to switch between adeposition mode and an etch mode according to some implementations. Theintegrated apparatus 500 includes a plasma processing chamber 524, wherethe plasma processing chamber 524 includes a showerhead 514 fordelivering process gases and a pedestal 518 for supporting a wafer. Theplasma processing chamber 524 can be a CCP reactor, where the showerhead514 includes a top electrode and the pedestal 518 includes a bottomelectrode. The integrated apparatus 500 can include multiple powersources for supplying RF power to the showerhead 514 and the pedestal518. In some implementations, the integrated apparatus 500 can includean LFRF generator 504 and an HFRF generator 502. The LFRF generator 504and the HFRF generator 502 may be operatively coupled to the showerhead514 or the pedestal 518 via one or more switches 564, 568. As usedherein, components that are “operatively coupled” with one another referto components that are in electrical connection or otherwise coupledwith one another depending on the operations of a controlling device(e.g., switch, system controller, etc.). The integrated apparatus 500can include one or more switches 564, 568 operatively coupled to one orboth of the LFRF generator 504 and the HFRF generator 502. The switches564, 568 may be configured to switch between (1) a deposition mode forperforming a deposition process, where the switches 564, 568 couple atleast the HFRF generator 502 to the showerhead 514, and (2) an etch modefor performing an etch process, where the switches 564, 568 couple atleast the LFRF generator 504 and the HFRF generator 502 to the pedestal518 and grounds the showerhead 514. When the HFRF generator 502 iscoupled to the showerhead 514 in the deposition mode, the HFRF generator502 can deliver RF power to the showerhead 514. When the HFRF generator502 and the LFRF generator 504 are coupled to the pedestal 518 in theetch mode, the HFRF generator 502 and the LFRF generator 504 can deliverRF power to the pedestal 518.

In FIG. 5, the switches 564, 568 can be replaced by filters, where thefilters can switch between (1) a deposition mode for performing adeposition process, where the filters couple selectively passhigh-frequency signals to the showerhead 514, and (2) an etch mode forperforming an etch process, where the filters selectively pass one orboth high-frequency and low-frequency signals to the pedestal 518 whilegrounding the showerhead 514.

As shown in FIG. 5, the one or more switches 564, 568 include a firststation relay switch 564 configured to couple the LFRF generator 504 andthe HFRF generator 502 to the showerhead 514 in the deposition mode. Ina first position, the first station relay switch 564 electricallyconnects the LFRF generator 504 and the HFRF generator 502 to theshowerhead 514. That way, the showerhead 514 is powered in thedeposition mode. In a second position, the first station relay switch564 is electrically grounded, so that the showerhead 514 is electricallygrounded. As shown in FIG. 5, the one or more switches 564, 568 includea second station relay switch 568 configured to couple the HFRFgenerator 502 and the LFRF generator 504 to the pedestal 518 in the etchmode. In a first position, the second station relay switch 568electrically connects the HFRF generator 502 and the LFRF generator 504to the pedestal 518. That way, the pedestal 518 is biased in the etchmode. In a second position, the second station relay switch 568 iselectrically grounded, so that the pedestal 518 is electricallygrounded.

In some implementations, the integrated apparatus 500 can include alow-frequency match unit 505 (or low-frequency impedance matchingnetwork 505) coupled to the LFRF generator 504. In some embodiments, theintegrated apparatus 500 can include a high-frequency match unit 503 (orhigh-frequency impedance matching network 503) coupled to the HFRFgenerator 502. In some implementations, the integrated apparatus 500 canfurther include one or more filters to selectively pass high or lowfrequency signals. The integrated apparatus 500 can include a low-passfilter 554 coupled to the low-frequency match unit 505, and a high-passfilter 552 coupled to the high-frequency match unit 503. In someembodiments, each of the low-pass filter 554 and the high-pass filter552 includes one or more capacitors and inductors. The low-pass filter554 can prevent high-frequency signals from getting back to the LFRFgenerator 504, and the high-pass filter 552 can prevent low-frequencysignals from getting back to the HFRF generator 502. In someimplementations, each of the low-pass filter 554 and the high-passfilter 552 can serve as RF filters for multiple plasma processingchambers, and not just the plasma processing chamber 524. In someimplementations, a blocking filter 532 can be inserted between the LFRFgenerator 504 and both the pedestal 518 and the showerhead 514 toselectively block high-frequency signals or low-frequency signals. Theblocking filter 532 can function similarly to the blocking capacitor 432in the RF hardware configuration of FIG. 4B.

In FIG. 5, the integrated apparatus 500 is selectively switchablebetween a deposition mode and an etch mode. In the deposition modeaccording to certain embodiments, the first station relay switch 564 isswitched to the first position so that the LFRF generator 504 and theHFRF generator 502 is electrically connected to the showerhead 514, andthe second station relay switch 568 is simultaneously switched to thesecond position so that the pedestal 518 is grounded. Such aconfiguration may be utilized for ALD. In the deposition mode accordingto alternative implementations, the first station relay switch 564 isswitched to the first position so that the LFRF generator 504 and theHFRF generator 502 are electrically connected to the showerhead 514, andthe second station relay switch 568 is simultaneously switched to thefirst position so that the LFRF generator 504 and the HFRF generator 502is electrically connected to the pedestal 518. In some implementations,the blocking filter 532 can prevent low-frequency signals from reachingthe showerhead 514. In the etch mode according to certainimplementations, the second station relay switch 568 is switched to thefirst position so that the LFRF generator 504 and the HFRF generator 502are electrically connected to the pedestal 518, and the first stationrelay switch 564 is simultaneously switched to the second position sothat the showerhead 514 is grounded. In some implementations, theblocking filter 532 can prevent low-frequency or high-frequency signalsfrom reaching the pedestal 518. In some implementations, bothlow-frequency and high-frequency signals can be used to bias thepedestal 518 in the etch mode.

The RF hardware configuration of FIG. 5 may optimize deposition and etchmodes using switches 564, 568 so that deposition-etch-depositionsequences can be performed in a single integrated apparatus 500.Additionally, the RF hardware configuration of FIG. 5 may utilizemultiple integrated circuit boards (e.g., splitter boards) toaccommodate both the HFRF generator 502 and the LFRF generator 504. Thesplitter board allows signal to be distributed not only to one plasmaprocessing chamber, such as the plasma processing chamber 524, but tomultiple plasma processing chambers. Each splitter board can includemultiple stations with multiple channels. One splitter board can includethe LFRF generator 504, the low-frequency match unit 505, and thelow-pass filter 554, and another splitter board can include the HFRFgenerator 502, the high-frequency match unit 503, and the high-passfilter 552. In some implementations, the switches 564, 568 may be relayswitches capable of at least 4 million, at least 20 million, or at least25 million cycles.

FIG. 6 shows a block diagram of an example scheme for switching betweena deposition mode and an etch mode according to some implementations.Like the RF hardware configuration shown in FIG. 5, an integratedapparatus 600 can include a showerhead 614, a pedestal 618, an HFRFgenerator 602, an LFRF generator 604, and multiple integrated circuitboards 623, 633 (e.g., splitter boards). The HFRF generator 602 and theLFRF generator 604 may be operatively coupled to the showerhead 614 andthe pedestal 618. The integrated apparatus 600 includes a switch 625operatively coupled to the HFRF generator 602. The switch 625 may beconfigured to switch between (1) a deposition mode for performingdeposition processes, where the switch 625 couples the HFRF generator602 to the showerhead 614, and (2) an etch mode for performing an etchprocess, where the switch 625 couples at least the LFRF generator 604and the HFRF generator 602 to the pedestal 618 and grounds theshowerhead 614.

In FIG. 6, the integrated apparatus 600 can include a first integratedcircuit board 623 and a first high-frequency match unit 603 associatedwith the deposition mode. In the deposition mode, the HFRF generator 602is electrically connected to the showerhead 614 via the switch 625, sothat the HFRF generator 602, the first high-frequency match unit 603,and the first integrated circuit board 623 are in electrical connectionwith the showerhead 614. The HFRF generator 602 and the firsthigh-frequency match unit 603 can deliver power to the showerhead 614 inthe deposition mode. In some implementations, the pedestal 618 isgrounded in the deposition mode.

In FIG. 6, the integrated apparatus 600 can include a second integratedcircuit board 633 and a low-frequency match unit 605 as well as a secondhigh-frequency match unit 613 associated with the etch mode. In the etchmode, the LFRF generator 604 is electrically connected to the pedestal618, and the HFRF generator 602 is electrically connected to thepedestal 618 via the switch 625. That way, the HFRF generator 602, thesecond high-frequency match unit 613, the LFRF generator 604, thelow-frequency match unit 605, and the second integrated circuit board633 are in electrical connection with the pedestal 618. The HFRFgenerator 602 and the second high-frequency match unit 613 as well asthe LFRF generator 604 and the low-frequency match unit 605 deliverpower to the pedestal 618 in the etch mode. In some implementations, theshowerhead 614 is grounded in the etch mode.

In some implementations, the switch 625 is an HFRF switchbox configuredto switch between delivering power from the HFRF generator 602 to theshowerhead 614 in the deposition mode, and delivering power from theHFRF generator 602 to the pedestal 618 in the etch mode. In thedeposition mode, only the HFRF generator 602 is coupled to theshowerhead 614 through the first integrated circuit board 623. In theetch mode, both the HFRF generator 602 and the LFRF generator 604 arecoupled to the pedestal 618 through the second integrated circuit board633. In some implementations, the first integrated circuit board 623 andthe second integrated circuit board 633 are communicatively coupled viaa synchronized relay control 635, and the synchronized relay control 635is communicatively coupled to the switch 625. The synchronized relycontrol 635 is configured to synchronize switching between thedeposition and etch modes. For example, if the first integrated circuitboard 623 is delivering power to the showerhead 614 from the HFRFgenerator 602 in the deposition mode, then the synchronized relaycontrol 635 can simultaneously communicate to the second integratedcircuit board 633 to not deliver power to the pedestal 618. Or, if thesecond integrated circuit board 633 is delivering power to the pedestal618 from the HFRF generator 602 and the LFRF generator 604 in the etchmode, then the synchronized relay control 635 can simultaneouslycommunicate to the first integrated circuit board 623 to not deliverpower to the showerhead 614.

Whereas the RF hardware configurations in FIGS. 5 and 6 utilize an HFRFgenerator, an LFRF generator, and separate integrated circuit boards forpowering a showerhead and/or pedestal, some RF hardware configurationsmay mix together the HFRF generator and the LFRF generator as a singlepower supply source and utilize a single integrated circuit board forpowering a showerhead and/or pedestal. In some implementations, the HFRFgenerator and the LFRF generator may be part of a single integratedcircuit board. The single integrated circuit board can deliverhigh-frequency and/or low frequency signals to a showerhead in one mode,and deliver high-frequency and/or low frequency signals to a pedestal inanother mode. The single integrated circuit board can include multiplestations with multiple channels.

FIG. 7 shows a block diagram of an alternative example scheme forswitching between a deposition mode and an etch mode according to someimplementations. An integrated apparatus 700 can include an integratedcircuit board 710, a showerhead 714, and a pedestal 718. The showerhead714 and the pedestal 718 may be part of a plasma processing chamber (notshown) for performing deposition-etch-deposition sequences on a wafer.The plasma processing chamber can be a CCP reactor, where the showerhead714 includes a top electrode and the pedestal 718 includes a bottomelectrode. The integrated circuit board 710 can include one or moreHF/LF RF generators 704, 708 and one or more switches 764, 768, wherethe one or more switches 764, 768 are configured to switch between (1) adeposition mode for performing a deposition process, where the one ormore switches 764, 768 in the deposition mode couples the HF/LFgenerator 704 to the showerhead 714, and (2) an etch mode for performingan etch process, where the one or more switches 764, 768 in the etchmode couples the HF/LF generator 708 to the pedestal 718. In someimplementations, the HF/LF RF generator(s) 704, 708 shown in FIG. 7 canbe a single HF/LF RF generator. A single HF/LF RF generator can becapable of delivering both high-frequency and low-frequency signals. Thesame HF/LF RF generator can be used to power the showerhead 714 or thepedestal 718.

In some embodiments, the integrated circuit board 710 can be outfittedwith multiple channels to power up multiple stations. At one of thestations can be a first station relay switch 764, and at one of theother stations can be a second station relay switch 768. The firststation relay switch 764 is configured to couple a first HF/LF RFgenerator 704 to the showerhead 714 in the deposition mode. When thefirst station relay switch 764 is in a first position, the integratedapparatus 700 is in the deposition mode and the first HF/LF RF generator704 is electrically connected to the showerhead 714 to power theshowerhead 714. The signal from the HF/LF RF generator 704 passesthrough a first inductor 774 to the showerhead 714. When the firststation relay switch 764 is in a second position, the showerhead 714 isgrounded. In some implementations, a first capacitor 734 is providedwhen the showerhead 714 is grounded to compensate for the inductance inthe return path. The second station relay switch 768 is configured tocouple a second HF/LF RF generator 708 to the pedestal 718 in the etchmode. When the second station relay switch 768 is in a first position,the integrated apparatus 700 is in the etch mode and the second HF/LF RFgenerator 708 is electrically connected to the pedestal 718 to bias thepedestal 718. The signal from the second station relay switch 768 passesthrough a second inductor 778 to the pedestal 718. When the secondstation relay switch 768 is in a second position, the pedestal 718 isgrounded. In some implementations, a second capacitor 738 is providedwhen the pedestal 718 is grounded to compensate for the inductance inthe return path.

In some embodiments as shown in FIG. 7, the integrated circuit board 710includes a switch 735, such as a digital output (DO) bit switch,configured to synchronize switching between modes. The switch 735 can becoupled to a first relay 744 and a second relay 748. In someimplementations, each of the first relay 744 and the second relay 748can be a high voltage vacuum relay. When the switch 735 is in adeposition mode, the first relay 744 can be in an open position and thesecond relay 748 can be in a closed position. When the switch is in anetch mode, the first relay 744 can be in a closed position and thesecond relay 748 can be in an open position. When the first relay 744 isopened and the second relay 748 is closed, the first station relayswitch 764 is in the first position and the second station relay switch768 is in the second position so that the showerhead 714 is powered andthe pedestal 718 is grounded. When the first relay 744 is closed and thesecond relay 748 is opened, the first station relay switch 764 is in thesecond position and the second station relay switch 768 is in the firstposition so that the pedestal 718 is powered and the showerhead 714 isgrounded. Such an arrangement in FIG. 7 allows for the HF/LF RFgenerator(s) 704, 708 to power the showerhead 714 and ground thepedestal 718 in the deposition mode, or for the HF/LF RF generator(s)704, 708 to power the pedestal 718 and ground the showerhead 714 in theetch mode.

The showerhead 714 in FIG. 7 may be grounded through a coaxial cable(not shown) positioned between the showerhead 714 and the first inductor774. The pedestal 718 in FIG. 7 may also be grounded through a coaxialcable positioned between the pedestal 718 and the second inductor 778.However, grounding through an inductor and a coaxial cable creates alonger return path to electrical ground. This can cause more voltage tobuild up on either the showerhead 714 or the pedestal 718, which caneffectively reduce the voltage between electrodes. This can cause theetch mode, for example, to be less effective if the pedestal 718 isbiased yet the voltage between the electrodes change.

Rather than grounding through an inductor and a coaxial cable, some RFhardware configurations may ground the showerhead and the pedestal localto the plasma processing chamber. FIG. 8 shows a schematic illustrationof an example integrated apparatus including a plasma processing chamberconfigured to switch between a deposition mode and an etch modeaccording to some implementations. An integrated apparatus 800 includesan integrated circuit board 810 and a plasma processing chamber 824,where the plasma processing chamber 824 includes a showerhead 814 and apedestal 818. The plasma processing chamber 824 may be a CCP reactor,where the showerhead 814 includes a top electrode and the pedestal 818includes a bottom electrode. The CCP reactor may be configured toperform deposition-etch-deposition sequences on a wafer. The integratedcircuit board 810 can include one or more HF/LF RF generators 804, 808and one or more switches 864, 868. The integrated apparatus 800 canfurther include additional switches 884, 888. The switches 864, 868,884, 888 are configured to switch between (1) a deposition mode forperforming a deposition process, where the switches 864, 868, 884, 888in the deposition mode couple the HF/LF RF generator 804 to theshowerhead 814 and ground the pedestal 818, and (2) an etch mode forperforming an etch process, where the switches 864, 868, 884, 888 in theetch mode couple the HF/LF RF generator 808 to the pedestal 818 andground the showerhead 814. In some implementations, the HF/LF RFgenerator(s) 804, 808 shown in FIG. 8 can be a single HF/LF RFgenerator. A single HF/LF RF generator can be capable of delivering bothhigh-frequency and low-frequency signals. The same HF/LF RF generatorcan be used to power the showerhead 814 or the pedestal 818.

In some implementations, the integrated circuit board 810 can beoutfitted with multiple channels to power up multiple stations. At oneof the stations can be a first station relay switch 864, and at one ofthe other stations can be a second station relay switch 868. The firststation relay switch 864 is configured to couple a first HF/LF RFgenerator 804 to the showerhead 814 in the deposition mode. When thefirst station relay switch 864 is in a first position, the integratedapparatus 800 is in the deposition mode and the first HF/LF RF generator804 is electrically connected to the showerhead 814 to power theshowerhead 814. The signal from the HF/LF RF generator 804 passesthrough a first inductor 874 to the showerhead 814. When the firststation relay switch 864 is in a second position, the showerhead 814 isgrounded. However, rather than grounding through the first inductor 874and a first coaxial cable 854, the showerhead 814 is grounded locally tothe plasma processing chamber 824. A showerhead grounding relay switch884 is provided local to the showerhead 814 and is coupled to a firststation associated with the first station relay switch 864. This reducesthe inductance in the return path and can eliminate the need forcompensation capacitors. The second station relay switch 868 isconfigured to couple a second HF/LF RF generator 808 to the pedestal 818in the etch mode. When the second station relay switch 868 is in a firstposition, the integrated apparatus 800 is in the etch mode and thesecond HF/LF RF generator 808 is electrically connected to the pedestal818 to bias the pedestal 818. The signal from the second station relayswitch 868 passes through a second inductor 878 to the pedestal 818.When the second station relay switch 868 is in a second position, thepedestal 818 is grounded. However, rather than grounding through thesecond inductor 878 and a second coaxial cable 858, the pedestal 818 isgrounded locally to the plasma processing chamber 824. A pedestalgrounding relay switch 888 is provided local to the pedestal 818 and iscoupled to a second station associated with the second station relayswitch 868. This reduces the inductance in the return path and caneliminate the need for compensation capacitors. In some implementations,locally grounding the electrodes can improve the etch process in theetch mode. However, each station in FIG. 8 is outfitted with two relayswitches instead of one, such as having relay switches 864, 884 at afirst station and relay switches 868, 888 at a second station.

The integrated circuit board 810 (e.g., splitter board) can includemultiple stations, where each station is capable of switching the poweron/off. The integrated circuit board 810 can include a DO bit switch(not shown) at one of the stations, where the DO bit switch isconfigured to synchronize switching between modes. Thus, all four relayswitches 864, 868, 884, 888 can be synchronized. For example, if the DObit switch is provided at a first station associated with the firststation relay switch 864, and if the first station relay switch 864 isswitched to the first position (e.g., turned on), then the showerhead814 is powered and the pedestal 818 is grounded. Specifically, thesecond station relay switch 868 is switched to the second position(e.g., turned off), and the pedestal grounding relay switch 888 locallygrounds the pedestal 818. If the first station relay switch 864 isswitched to the second position (e.g., turned off), then the pedestal818 is powered and the showerhead 814 is grounded. Specifically, thesecond station relay switch 868 is switched to the first position (e.g.,turned on), and the showerhead grounding relay switch 884 locallygrounds the showerhead 814. Such an arrangement in FIG. 8 allows for theHF/LF RF generator(s) 804, 808 to power the showerhead 814 and groundthe pedestal 818 in the deposition mode, or for the HF/LF RFgenerator(s) 804, 808 to power the pedestal 818 and ground theshowerhead 814 in the etch mode.

The aforementioned RF hardware configurations in integrated apparatusesdescribed in FIGS. 5-8 can provide a simpler and more flexible toolsolution for performing deposition-etch-deposition sequences thanconventional tools. FIG. 9A shows a schematic illustration of an exampleconventional multi-station processing tool for carrying outdeposition-etch-deposition gap fill processes. A multi-stationprocessing tool 900 a includes a robot 906 configured to move wafersfrom a cassette loaded through a pod 908 into a load lock and ultimatelyinto one of four process chambers 911, 912, 913, 914, though it isunderstood that there may be fewer or more process chambers. Themulti-station processing tool 900 a can include similar features as themulti-station processing tool 300 in FIG. 3. In the multi-stationprocessing tool 900 a, three of the process chambers 911, 912, 913 maybe configured to perform deposition processes, such as ALD, and one ofthe process chambers 914 may be configured to perform an etch process.

FIG. 9B shows a schematic illustration of an example multi-stationprocessing tool including a disclosed integrated apparatus for carryingout deposition-etch-deposition gap fill processes. A multi-stationprocessing tool 900 b includes a robot 906 configured to move wafersfrom a cassette loaded through a pod 908 into a load lock and ultimatelyinto one of three process chambers 921 a, 921 b, 921 c, though it isunderstood that there may be fewer or more process chambers. Themulti-station processing tool 900 b can include similar features as themulti-station processing tool 300 in FIG. 3. In the multi-stationprocessing tool 900 b, each of the process chambers 921 a, 921 b, 921 cmay be configured to perform both deposition and etch processes. Forexample, each of the process chambers 921 a, 921 b, 921 c mayincorporate an integrated apparatus with a certain RF hardwareconfiguration shown in FIGS. 5-8. The multi-station processing tool 900b may provide for fast frequency tuning for deposition processes, highetch rates for etch processes, tapered etch profiles for etch processes,and improved flexibility by performing multipledeposition-etch-deposition sequences for gap fill in the same chamber.

The multi-station processing tool 900 b may include a system controller(not shown), such as the system controller 350 in FIG. 3. The systemcontroller may be configured to provide instructions for performingoperations, including the operations of switching between deposition andetch modes. The system controller may be part of a system, which may bepart of an integrated apparatus. The system controller may provideprogram instructions for operating in deposition and etch modes usingany of the above-described RF hardware configurations in FIGS. 5-8. Thesystem controller may include instructions for controlling RF powerlevels, RF frequencies, duty cycle, wafer temperature, chamber and/orstation temperature, chamber and/or station pressure, wafer and/orpedestal position, timing, mixture of gases, gas flow rates, purgeconditions and timing, deposition and etch mode switching, etc.

Broadly speaking, the system controller may be defined as electronicshaving various integrated circuits, logic, memory, and/or software thatreceive instructions, issue instructions, control operation, enablecleaning operations, enable endpoint measurements, and the like. Theintegrated circuits may include chips in the form of firmware that storeprogram instructions, digital signal processors (DSPs), chips defined asapplication specific integrated circuits (ASICs), and/or one or moremicroprocessors, or microcontrollers that execute program instructions(e.g., software). Program instructions may be instructions communicatedto the system controller in the form of various individual settings (orprogram files), defining operational parameters for carrying out aparticular process on or for a semiconductor wafer or to a system. Theoperational parameters may, in some embodiments, be part of a recipedefined by process engineers to accomplish one or more processing stepsduring the fabrication of one or more layers, materials, metals,surfaces, circuits, and/or dies of a wafer.

The system controller, in some implementations, may be a part of orcoupled to a computer that is integrated with, coupled to the system,otherwise networked to the system, or a combination thereof. Forexample, the system controller may be in the “cloud” or all or a part ofa fab host computer system, which can allow for remote access of thewafer processing. The computer may enable remote access to the system tomonitor current progress of fabrication operations, examine a history ofpast fabrication operations, examine trends or performance metrics froma plurality of fabrication operations, to change parameters of currentprocessing, to set processing steps to follow a current processing, orto start a new process. In some examples, a remote computer (e.g. aserver) can provide process recipes to a system over a network, whichmay include a local network or the Internet. The remote computer mayinclude a user interface that enables entry or programming of parametersand/or settings, which are then communicated to the system from theremote computer. In some examples, the system controller receivesinstructions in the form of data, which specify parameters for each ofthe processing steps to be performed during one or more operations. Itshould be understood that the parameters may be specific to the type ofprocess to be performed and the type of tool that the system controlleris configured to interface with or control. Thus as described above, thesystem controller may be distributed, such as by comprising one or morediscrete controllers that are networked together and working towards acommon purpose, such as the processes and controls described herein. Anexample of a distributed controller for such purposes would be one ormore integrated circuits on a chamber in communication with one or moreintegrated circuits located remotely (such as at the platform level oras part of a remote computer) that combine to control a process on thechamber.

Depending on the process step or steps to be performed by the tool, thesystem controller may communicate with one or more of other toolcircuits or modules, other tool components, cluster tools, other toolinterfaces, adjacent tools, neighboring tools, tools located throughouta factory, a main computer, another controller, or tools used inmaterial transport that bring containers of wafers to and from toollocations and/or load ports in a semiconductor manufacturing factory.The system controller may be configured with instructions to perform oneor more of the operations described below.

Process Conditions

FIG. 10 shows a flow diagram illustrating an example process flow forperforming a deposition-etch-deposition gap fill process on a wafer. Theoperations in a process 1000 may be performed in different orders and/orwith different, fewer, or additional operations. A system controller asdescribed above may be configured with instructions to perform one ormore of the following operations.

With an integrated tool solution provided in FIGS. 5-9B for depositionand etch processes, deposition-etch-deposition gap fill processes can beperformed in the same plasma processing chamber throughout. Furthermore,the process conditions for performing etch processes can be compatiblewith the process conditions for performing deposition processes. In someimplementations, process conditions such as wafer temperature, chamberpressure, frequency, and RF power may be adjusted to be compatible withdeposition processes yet still provide an effective anisotropic etch ina deposition-etch-deposition sequence.

The process 1000 can being at block 1005, where a wafer is provided in aplasma processing chamber, where the wafer has one or more gaps eachhaving a depth to width aspect ratio of greater than about 5:1. Thewafer can be a semiconductor wafer as used in the production ofintegrated circuits. The wafer can have one or more features so that thewafer is non-planar. In some implementations, the one or more featurescan include one or more gaps, trenches, or recesses. A gap fill processcan be performed on the wafer with one or more gaps. The gap width inthe wafer can vary according to various embodiments, which may rangefrom about 5 Å to about 50 μm, or from about 100 Å to about 1 μm.Examples of depth to width aspect ratios can be greater than about 2:1,or greater than about 5:1, or greater than about 10:1, or greater thanabout 30:1, or greater than about 50:1, or greater than about 100:1.Moreover, the plasma processing chamber can be a CCP reactor including ashowerhead for delivering process gases and a pedestal for supportingthe wafer, where the showerhead includes a top electrode and thepedestal includes a bottom electrode.

At block 1010 of the process 1000, a first dielectric layer can bedeposited in the one or more gaps via ALD in the plasma processingchamber. In some implementations, the first dielectric layer can be adielectric oxide, such as silicon dioxide (SiO₂). With ALD, a conformalfilm of the first dielectric layer can be deposited on the non-planarwafer. During deposition of the first dielectric layer via ALD, theplasma processing chamber can be in a deposition mode where at least theshowerhead is powered by an RF generator. In some implementations, thepedestal can be grounded during deposition of the first dielectriclayer. In some implementations, the RF generator may be capable of fastfrequency tuning.

At block 1015 of the process 1000, the first dielectric layer isanisotropically etched with slope control in the plasma processingchamber. The anisotropic etch creates a tapered positive slope in theas-deposited film of the first dielectric layer. The anisotropic etchcan selectively remove more dielectric material near the top of the gapthan inside and near the bottom of the gap. For the purposes of thisdescription, “near the top of the gap” or “near the opening” is definedas an approximate position or an area within the gap (i.e., along thesidewall of the gap) corresponding to about 0-10% of the gap depthmeasured from the field region. In certain embodiments, the area nearthe opening or near the top of the gap corresponds to the area at theopening or at the top of the gap. Further, “inside and near the bottomof the gap” or “inside the gap” is defined as an approximate position oran area within the gap corresponding to between about 20-60% of the gapdepth from the field region on the top of the gap. Typically, whenvalues for certain parameters (e.g., thicknesses) are specified “nearthe opening” or “inside the gap”, these values represent a measurementor an average of multiple measurements taken within thesepositions/areas. The anisotropic etch is performed with slope control soas to create a sloped profile near the top of the gap than inside andnear the bottom of the gap. In some implementations, the etchant for theanisotropic etch can include a fluorine-based etchant, such as nitrogentrifluoride (NF₃).

The anisotropic etch step performed at block 1015 can occur in the sameplasma processing chamber as the deposition step performed at block1010. In some embodiments, the plasma processing chamber at block 1015can be in an etch mode, where the pedestal is powered by an RF generatorand the showerhead is grounded. In some implementations, one or moreswitches may be utilized to switch the RF generator from powering theshowerhead in the deposition mode to powering the pedestal in the etchmode. For example, the process 1000 can further include switching toapply a low-frequency power and a high-frequency power to the pedestalin the plasma processing chamber and to ground a showerhead in theplasma processing chamber prior to anisotropically etching the firstdielectric layer.

Process conditions for the deposition mode at block 1010 may becompatible with process conditions for the etch mode at block 1015. Insome implementations, the wafer temperature during both etch anddeposition processes may be between 50° C. and 650° C., or greater than100° C., or greater than 200° C., or greater than 300° C., or evengreater than 400° C. Such wafer temperature ranges may apply at block1010, 1015, and 1020. In some implementations, chamber pressure for bothetch and deposition processes can be between 0.1 Torr and 10 Torr, orbetween 0.3 Torr and 1 Torr. Such chamber pressures may apply at block1010, 1015, and 1020. In some implementations, the LFRF generator canprovide an RF frequency of about 400 kHZ, and the HFRF generator canprovide an RF frequency of about 13.56 MHz. Such frequencies may applyat block 1010, 1015, and 1020. The generated low-frequency power can bebetween about 1500 W and about 6000 W, and the generated high-frequencypower can be between about 0 W and about 5000 W. Such RF powers mayapply at block 1010, 1015, and 1020. Typical etch processes do notoperate at such high wafer temperatures and do not operate at such lowfrequencies to generate such large low-frequency powers. In someimplementations, the concentration of NF₃ may be between about 1.0-2.5%for etching. Typical etch processes may also not use such small amountsof NF₃ for etching. Table I provides an example set of wafer temperatureranges, gas mixtures, gas concentrations in terms of flow rate,pressure, high-frequency power, low-frequency power, and NF₃concentration.

TABLE I 13.56 MHz 400 kHz Wafer HF LF Temperature NF₃ He Ar O₂ PressurePower Power NF₃ (° C.) (sccm) (sccm) (sccm) (sccm) (Torr) (W) (W) (%)80-400 250 2500 5000 2500 0.6 2000 3000 2.44 250 5000 5000 0 0.6 20003000 2.44 250 2500 5000 2500 0.6 0 3000 2.44 250 0 5000 5000 0.6 0 30002.44 125 0 2500 2500 0.3 0 3000 2.44 125 0 2500 2500 0.3 2000 3000 2.44250 2500 5000 2500 0.6 2000 3000 2.44 50 2500 2500 0 0.3 1000 3000 0.99125 2500 2500 0 0.3 1000 3000 2.44 50 2500 2500 0 1.0 1000 3000 0.99 1252500 2500 0 1.0 1000 3000 2.44 50 2500 2500 0 0.3 700 1600 0.99 Wafer HFLF Temperature NF₃ He Ar N₂ Pressure Power Power NF₃ (° C.) (sccm)(sccm) (sccm) (sccm) (Torr) (W) (W) (%) 80-400 250 2500 5000 2500 0.62000 3000 2.44 250 2500 5000 2500 0.6 0 3000 2.44 250 0 5000 5000 0.6 03000 2.44 125 0 2500 2500 0.3 0 3000 2.44 125 0 2500 2500 0.3 2000 30002.44 250 2500 5000 2500 0.6 2000 3000 2.44

At block 1020 of the process 1000, a second dielectric layer can bedeposited in the one or more gaps over the first dielectric layer viaALD in the plasma processing chamber. In some implementations, thesecond dielectric layer can be a dielectric oxide, such as SiO₂. WithALD, a conformal film of the second dielectric layer can be deposited onthe non-planar wafer. In some embodiments, the second dielectric layercan fill and close the one or more gaps. During deposition of the seconddielectric layer, the plasma processing chamber can be in the depositionmode where at least the showerhead is powered by an RF generator. Insome implementations, the pedestal can be grounded during deposition ofthe second dielectric layer. The second dielectric layer can bedeposited in the same plasma processing chamber as the anisotropic etchwith slope control. In some implementations, the process 1000 canfurther include switching to apply the high-frequency power to theshowerhead in the plasma processing chamber and to ground the pedestalin the plasma processing chamber prior to depositing the seconddielectric layer.

Lithographic Patterning

The apparatuses/processes described hereinabove may be used inconjunction with lithographic patterning tools or processes, forexample, for the fabrication or manufacture of semiconductor devices,displays, LEDs, photovoltaic panels and the like. Typically, though notnecessarily, such tools/processes will be used or conducted together ina common fabrication facility. Lithographic patterning of a filmtypically comprises some or all of the following steps, each stepenabled with a number of possible tools: (1) application of photoresiston a workpiece, i.e., substrate, using a spin-on or spray-on tool; (2)curing of photoresist using a hot plate or furnace or UV curing tool;(3) exposing the photoresist to visible or UV or x-ray light with a toolsuch as a wafer stepper; (4) developing the resist so as to selectivelyremove resist and thereby pattern it using a tool such as a wet bench;(5) transferring the resist pattern into an underlying film or workpieceby using a dry or plasma-assisted etching tool; and (6) removing theresist using a tool such as an RF or microwave plasma resist stripper.

OTHER EMBODIMENTS

Although illustrative embodiments and applications of this invention areshown and described herein, many variations and modifications arepossible which remain within the concept, scope, and spirit of theinvention, and these variations would become clear to those of ordinaryskill in the art after perusal of this application. Accordingly, thepresent embodiments are to be considered as illustrative and notrestrictive, and the invention is not to be limited to the details givenherein, but may be modified within the scope and equivalents of theappended claims.

1-18. (canceled)
 19. An integrated apparatus for performing depositionand etchprocesses, the apparatus comprising: a process chamber, whereinthe process chamber includes a showerhead and a pedestal; one or more RFgenerators; and one or more filters operatively coupled to the one ormore RF generators, wherein the integrated apparatus is configured toswitch between (1) a deposition mode for performing a depositionprocess; wherein the one or more filters in the deposition modeselectively prevents low-frequency signals from the showerhead andselectively passes high-frequency signals to the showerhead, and (2) anetch mode for performing an etch process, wherein the one or morefilters in the etch mode selectively passes high-frequency signals andlow-frequency signals to the pedestal while grounding the showerhead.20. The apparatus of claim 19, wherein the process chamber is acapacitively-coupled plasma (CCP) reactor, and wherein the showerheadincludes a top electrode and the pedestal includes a bottom electrode.21. The apparatus of claim 19, further comprising: one or more switchesoperatively coupled to the one or more RF generators.
 22. The apparatusof claim 21, wherein the one or more switches in the deposition modecouple the one or more RF generators to the showerhead.
 23. Theapparatus of claim 21, wherein the one or more switches in the etch modecouple the one or more RF generators to the pedestal and ground theshowerhead.
 24. The apparatus of claim 19, wherein the one or more RFgenerators include an HFRF generator and a LFRF generator.
 25. Theapparatus of claim 24, wherein the one or more switches include: a firststation relay switch configured to electrically connect the LFRFgenerator and the HFRF generator to the showerhead in the depositionmode; and a second station relay switch configured to electricallyconnect the LFRF generator and the HFRF generator to the pedestal in theetch mode.
 26. An integrated apparatus for performing deposition andetch processes, the apparatus comprising: a process chamber, wherein theprocess chamber includes a showerhead and a pedestal; one or more RFgenerators; and a system controller operatively coupled to the one ormore RF generators, wherein the system controller is configured withinstructions for performing the following operations: couple the one ormore RF generators to at least the showerhead in a deposition mode; andcouple the one or more RF generators to at least the pedestal in an etchmode.
 27. The apparatus of claim 26, wherein the system controller isfurther configured with instructions for performing the followingoperations: provide a wafer on the pedestal in the process chamber,wherein the wafer includes a first dielectric layer; anisotropicallyetch, in the process chamber, the first dielectric layer when the one ormore RF generators are coupled to at least the pedestal in the etchmode; and deposit, in the process chamber, a second dielectric layerover the first dielectric layer via ALD when the one or more RFgenerators are coupled to at least the showerhead in the depositionmode.
 28. The apparatus of claim 26, wherein the process chamber is aCCP reactor, and wherein the showerhead includes a top electrode and thepedestal includes a bottom electrode.
 29. The apparatus of claim 26,further comprising: one or more filters operatively coupled to the oneor more RF generators, wherein the integrated apparatus is configured toswitch between (1) the deposition mode for performing a depositionprocess, wherein the one or more filters in the deposition modeselectively prevents low-frequency signals from the showerhead andselectively passes high-frequency signals to the showerhead, and (2) theetch mode for performing an etch process; wherein the one or morefilters in the etch mode selectively passes high-frequency signals andlow-frequency signals to the pedestal while grounding the showerhead.30. The apparatus of claim 26, wherein the one or more RF generatorsinclude an HFRF generator and a LFRF generator.
 31. The apparatus ofclaim 30, wherein the system controller configured with instructions tocouple the one or more RF generators to at least the showerhead in adeposition mode is configured with instructions to couple at least theHFRF generator to the showerhead, and wherein the system controllerconfigured with instructions to couple the one or more RF generators toat least the pedestal in the etch mode is configured with instructionsto couple the HFRF generator and the LFRF generator to the pedestal andground the showerhead.
 32. The apparatus of claim 26, wherein the waferhas one or more gaps each having a depth to width aspect ratio ofgreater than about 5:1, wherein the wafer includes the first dielectriclayer in the one or more gaps.
 33. The apparatus of claim 26, furthercomprising: one or more switches operatively coupled to the one or moreRF generators.